Gasonics 90-2678 B W/90-2679 Control Panel

Gasonics 90-2678 B W/90-2679 Control Panel

Product Details Introduction

The Gasonics 90-2678 B and 90-2679 control panel combination is a human-machine interaction control interface system (HMI control panel) in the Gasonics plasma stripping equipment, used by operators for key functions such as equipment parameter setting, status monitoring, process control, and alarm management.

1、 Product Overview

90-2678 B and 90-2679 are two sub components of the Gasonics control panel system:

90-2678 B: Main function input panel (may include LCD display, buttons, indicator lights)

90-2679: Auxiliary control module, which may be a switch, power control, or function selection key area

They are usually installed on the front panel of the equipment, integrated to form a complete user interface, especially for plasma processing equipment such as Gasonics Aura 2000, PEP 3510, L3510, etc.

2、 Functional division and characteristics

Module Number Function Description

90-2678 B main control panel, may include:

Display screen (VFD or LCD)

Function menu selection button

Process control buttons (START/STOP/RESET)

Status indicator lights (Power, Vacuum, RF, Alarm)|

|90-2679 | Auxiliary control module, which may include:

Power switch or key lock switch

Manual/automatic mode selection switch

Safety interlock reset button

Extended signal interface connected to 90-2678|

These two panels are connected to the main controller (such as I/O board or PLC control board) through built-in cables or connectors, together forming a complete control input/output system.

3、 Application scenarios

Wafer processing control interface

Set process parameters such as stripping time, gas flow rate, RF power, etc

Equipment status monitoring platform

Real time monitoring of equipment vacuum status, processing chamber temperature, and alarm status

Operational Permissions and Security Control

Limit operation level through key switch/selector knob to ensure process safety

Maintenance and Testing Mode Entrance

Perform auxiliary tasks such as sensor detection and manual handling in engineering mode

Product imag

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