Gasonics A90-005-02 Controller Board

Gasonics A90-005-02 Controller Board

Product Details Introduction

The Gasonics A90-005-02 Controller Board is a highly integrated control circuit board used in Gasonics plasma stripping equipment, mainly responsible for signal processing, status feedback, drive control, and logic judgment of subsystems such as RF, power supply, gas, vacuum, etc. This controller board provides critical automation control capabilities for the equipment and is one of the core electronic modules.

1、 Product Overview

Model: A90-005-02

Type: Controller Board/I/O Control Board/Logic Processing Module

Manufacturer: Gasonics (a sub brand of Applied Materials, specializing in plasma stripping)

This control board is commonly used in the central control area of Gasonics equipment, connecting various sensors, actuators, and upper control systems such as PLC or main control computer.

2、 Core functions

Description of Control Function Categories

I/O signal processing receives and outputs multi-channel digital/analog signals for controlling gas valves, pumps, heaters, etc

Real time reading of sensor data such as temperature, pressure, and flow rate for equipment status monitoring, and feedback to the main system

Process interlocking and alarm realize safety interlocking for process control such as cavity switch, gas path switching, RF power on, etc

Interface communication with upper systems (such as panel controllers, main control computers) for serial/parallel communication

Power supply and protection board onboard stabilized power supply, overload protection, and self diagnostic circuit

3、 Application devices

The Gasonics A90-005-02 controller board may be widely used in the following devices:

Gasonics Aura 2000 / Aura 3010

Gasonics PEP 3510 / 3600

Gasonics L3510 series plasma stripping system

Other customized models or OEM cooperative equipment (compatible with TEL and Lam)

Product imag

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