Gasonics A90-003-01 Control Board

Gasonics A90-003-01 Control Board

Product Details Introduction

The Gasonics A90-003-01 Controller Board is one of the key electronic control components in the Gasonics plasma stripping equipment, mainly responsible for coordinating the operation of various subsystems, managing input and output signals, driving execution components, executing logic judgments, etc. It plays the role of the "brain" in the automation control of equipment.

1、 Basic Information

Project Description

Part number A90-003-01

Product Name: Control Board/Controller Motherboard

Applicable equipment Gasonics plasma stripping system, such as PEP 3510, Aura series, etc

Functional type core I/O control logic board, used for processing signal input/output, driving, feedback, and communication

2、 Main functions

Functional category description

I/O signal processing deals with digital/analog signals from sensors, buttons, switches, etc

The actuator drives and controls equipment such as vacuum pumps, gas valves, RF sources, electromagnetic relays, etc

Real time monitoring of key system parameters such as chamber status, power status, temperature, vacuum, etc

Interlocking and alarm implementation of key process safety interlocking mechanisms, such as door not being locked, high temperature alarm, etc

Communication function and control panel (such as 90-2678B), main controller or upper computer communication

3、 Application location

The A90-003-01 control board is usually installed in the control box on the back of the equipment and works in conjunction with the following modules:

A90-005 series control board: advanced logic control/communication scheduling

90-1031 interface board: connected to peripheral sensors and actuators

12-300000 microwave power module: start and adjust power output through the control board

11070 series controller: as a low-level hardware support platform or I/O expansion

Product imag

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