Gasonics A97-127-01 Controller Module

Gasonics A97-127-01 Controller Module

Product Details Introduction

The Gasonics A97-127-01 controller module is a specialized controller unit used in Gasonics plasma stripping systems to control the status and operational logic of specific subsystems such as gas channels, chamber vacuum, RF sources, vehicle transmission, or safety interlocks. It usually serves as an intermediate module, connecting the front-end panel, main control board (such as A90 series), and execution components.

1、 Basic Information

Project Content

Part number A97-127-01

Name Controller Module

Manufacturer Gasonics/Applied Materials

The equipment is suitable for plasma stripping systems such as Gasonics PEP, Aura, L3510, AE series, etc

Category positioning I/O control expansion module/subsystem driver controller

2、 Core functions and roles

Functional category description

Signal processing receives control instructions from the main control system, amplifies, isolates, and distributes output signals

Execute peripheral sub devices such as drive control solenoid valves, relays, fans, pumps, or lights

Status feedback returns the working status of the subsystem to the main control system (such as air pressure OK, door closed, vacuum stable)

Interlocking management realizes process control interlocking, for example: RF is disabled if no vacuum is drawn

Module communication may be communicated with the main controller or other boards through dedicated parallel/serial ports

Product imag

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