Gasonics 94-1174 Top Level Indexer

Gasonics 94-1174 Top Level Indexer

Product Details Introduction

The Gasonics 94-1174 Top Indexer is a wafer positioning and handling sub component used in Gasonics plasma stripping systems, typically responsible for precise top positioning, lifting, or loading/unloading operations of wafers during wafer processing. It is one of the critical actuators in automated wafer handling systems.

1、 Product Overview

Gasonics 94-1174 Top Indexer is a mechanical pneumatic or electric combination driven positioning device, mainly installed at the top of the wafer handling area (such as Load Station or Transfer Chamber) of the equipment, used in conjunction with mechanical arms, lifting platforms and other mechanisms to achieve precise positioning and short distance vertical movement of wafers in the Z-axis direction.

2、 Technical functions

Function Category Function Description

Precision wafer positioning fine tunes the wafer in the X-Y or Z-axis direction to ensure alignment and facilitate entry into the processing chamber

Vertical lifting and lowering (in the Z direction) during wafer handling to assist in loading/unloading wafers

Sensor feedback built-in proximity/photoelectric sensor, used to detect whether the wafer is in place or offset

Automatic synchronization control is coordinated with the main control system or robot handling program to achieve automatic process linkage

3、 Application scenarios

The Gasonics 94-1174 top-level indexer is widely used in the following devices and scenarios:

Upper/lower wafer area in Gasonics plasma stripping equipment

Typical examples include Aura 2000, PEP 3510, and L3510 series, which are responsible for the initial alignment of wafers before entering the processing chamber

Positioning device in automatic wafer handling system

Coordinated positioning with vacuum robotic arm, rotating platform or horizontal conveyor track

Wafer inspection and pre alignment process

Scan, locate notches or align reference edges on the surface of the wafer before processing

Product imag

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