TEL Tokyo Electron EC81-000053-11 Digital Control Board

TEL Tokyo Electron EC81-000053-11 Digital Control Board

Product Details Introduction

The TEL Tokyo Electron EC81-000053-11 Digital I/O Control Board is one of the key control modules used in TEL semiconductor equipment, responsible for processing and executing control tasks for digital input/output signals. This board is widely deployed in multiple core equipment systems of TEL, especially for performing mechanical linkage, equipment status monitoring, safety interlocking, and process logic control.

1、 Basic Information

Product Name: Digital Control Board

Product model: EC81-000053-11

Manufacturer: Tokyo Electron Ltd. (TEL)

Board type: Digital I/O Board

Deployment location: In the equipment control cabinet or module control system

2、 Main functions

Digital Signal Input Processing (DI)

Receive switch signals from external devices such as sensors, limit switches, buttons, relays, etc;

Determine the operational status, physical location status, or process triggering conditions of the equipment.

Digital Signal Output Control (DO)

Output control signals to actuators such as relays, pneumatic valves, electromagnetic locks, indicator lights, etc;

Used for equipment action control, status feedback, or safety interlock output.

State monitoring and logic control

Collaborate with the main controller (PLC/embedded system) to implement tasks such as process logic, fault response, and automatic switching.

Communication and synchronization

Communicate with the main control system through the backplane bus or dedicated control bus to participate in synchronous operation of multiple modules.

3、 Typical application areas

Application device control tasks

Etcher (dry etching) control valve switch, plasma start stop, safety door status detection, etc

CVD/ALD equipment management gas supply valve, power interlock, temperature control system start stop

Photolithography coating equipment (Track) controls wafer transfer actions, baking unit gate control, and development process logic

The wafer handling system detects signals such as the arrival of the robotic arm, vacuum suction, and tray status

Product imag

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