TEL Tokyo Electron 1181-000544-13 Digital Control Board
Product Details Introduction
TEL Tokyo Electron 1181-000544-13 Digital I/O Control Board is a high reliability control module used in semiconductor manufacturing equipment. It is mainly used to collect and output digital signals (switch values), realize various internal action control, status detection, signal relay, and safety interlock logic functions of the equipment.
1、 Basic Information
Product Name: Digital Control Board
Product model: 1181-000544-13
Manufacturer: Tokyo Electron Ltd. (TEL)
Function category: Digital input/output control (DI/DO control)
Applicable systems: TEL Etcher, Coater/Developer, ALD/CVD, handling systems and other types of equipment
2、 Core functions
Digital Input Acquisition (DI)
Receive status feedback signals from various components of the receiving device, such as:
Access control switch status
Pressure sensor triggered
Vacuum pump in place signal
Mechanical limit status, etc
Digital Output Control (DO)
Send control signals to the executing agency, such as:
Open/close the air valve
Start the fan, heater, or relay
Control the action devices such as alarm lights, buzzers, electromagnetic locks, etc
Interlocking and Interlocking Control
Used for inter system security linkage, such as logical judgment in scenarios such as "door not closed → prohibit vacuum start".
High speed logical response
Communicate with the main control system (such as PLC or TEL dedicated controller) to achieve millisecond level response process beat control.
Product imag

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