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  • TEL Tokyo Electron 1181-000544-13 Digital Control Board
  • TEL Tokyo Electron 1181-000544-13 Digital Control Board
  • TEL Tokyo Electron 1181-000544-13 Digital Control Board
TEL Tokyo Electron 1181-000544-13 Digital Control Board TEL Tokyo Electron 1181-000544-13 Digital Control Board TEL Tokyo Electron 1181-000544-13 Digital Control Board

TEL Tokyo Electron 1181-000544-13 Digital Control Board

  • Goods status: new/used
  • Delivery date: stock
  • The quality assurance period: 365 days
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TEL Tokyo Electron 1181-000544-13 Digital Control Board

Product Details Introduction

TEL Tokyo Electron 1181-000544-13 Digital I/O Control Board is a high reliability control module used in semiconductor manufacturing equipment. It is mainly used to collect and output digital signals (switch values), realize various internal action control, status detection, signal relay, and safety interlock logic functions of the equipment.


1、 Basic Information

Product Name: Digital Control Board


Product model: 1181-000544-13


Manufacturer: Tokyo Electron Ltd. (TEL)


Function category: Digital input/output control (DI/DO control)


Applicable systems: TEL Etcher, Coater/Developer, ALD/CVD, handling systems and other types of equipment


2、 Core functions

Digital Input Acquisition (DI)


Receive status feedback signals from various components of the receiving device, such as:


Access control switch status


Pressure sensor triggered


Vacuum pump in place signal


Mechanical limit status, etc


Digital Output Control (DO)


Send control signals to the executing agency, such as:


Open/close the air valve


Start the fan, heater, or relay


Control the action devices such as alarm lights, buzzers, electromagnetic locks, etc


Interlocking and Interlocking Control


Used for inter system security linkage, such as logical judgment in scenarios such as "door not closed → prohibit vacuum start".


High speed logical response


Communicate with the main control system (such as PLC or TEL dedicated controller) to achieve millisecond level response process beat control.

Product imag

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