TEL Tokyo Electron BX81-070098-14 Controller Module

TEL Tokyo Electron BX81-070098-14 Controller Module

Product Details Introduction

The TEL Tokyo Electron BX81-070098-14 controller module is a specialized control board used in semiconductor manufacturing equipment, widely used in Tokyo Electron's equipment control system, especially for key tasks such as subsystem control, signal distribution, and execution action driving in precision process flow.

1、 Basic Information

Product model: BX81-070098-14

Product Name: Controller Module

Manufacturer: TEL (Tokyo Electron Limited)

Module type: High integration controller/driver board

Applicable equipment: Sub modules that may belong to TEL CLEAN TRACK, ACT series, or supporting equipment

2、 Main functions

Functional classification description

The control function controls the actions of actuators (such as motors, valves, gas circulation, light sources, etc.) by receiving commands from the main control system.

Real time data exchange between data communication and the main system or other sub modules, performing tasks such as feedback and instruction transmission.

Electrical drive provides a certain power driving capability for driving hardware devices or intermediate relays.

Real time monitoring of the current operating status, such as temperature, voltage, execution position, etc.

Fault protection is a built-in circuit protection mechanism that prevents overcurrent, short circuit, signal abnormalities, and other factors from affecting the stability of the main system.

3、 Application field (system integration)

The BX81 series modules are commonly used in the following scenarios:

Coater/Developer systems (such as ACT12 and ACT8 series)

Control the adhesive rotary motor, heating plate, vacuum fixture, spray developer and other devices.

Cleaning/development pre-treatment equipment

Manage cleaning arms, liquid supply systems, solenoid valve control, sensor signals, etc.

Interface module communication management

Connect the main control computer with the lower level controller to complete signal aggregation and distribution.

Photolithography/front-end process auxiliary module

Used for collaborative work with lithography machines, heat treatment chambers, micro pump systems, etc.

Product imag

Related website links

REXROTH PPC-R22.1N-T-NN-P1-NN-FW servo

DELTA TAU ACC-24E2 interface simulation

ALSTOM 3EST125-975 DCC2382A Control Pane

Other website links

ABB PM860K01 3BSE018100R1处理器模块

ASEA YL261001-AL PC板

ABB SM810K01 3BSE030928R1总线互连模块