TEL Tokyo Electron 1B80-002389-11 Sensor Module

TEL Tokyo Electron 1B80-002389-11 Sensor Module

Product Details Introduction

The TEL Tokyo Electron 1B80-002389-11 Sensor Module is a critical detection component designed specifically for semiconductor manufacturing equipment. It is used to collect environmental or equipment operating parameters, enabling precise monitoring and control of the process. This module typically integrates multiple sensor types, supports signal conditioning and digital/analog output, ensuring that the system can respond in real-time to changes in key parameters.

1、 Basic Product Information

Project Content

Product model 1B80-002389-11

Product Name: Sensor Module

Manufacturer Tokyo Electron Ltd. (TEL)

Module type: Multi functional signal acquisition and sensor interface module

2、 Core functions and roles

Detailed description of functional categories

Multi sensor integration supports multiple sensor input interfaces such as temperature, pressure, humidity, gas flow, etc.

Signal conditioning amplifies, filters, and converts the weak electrical signals output by sensors.

The data output provides standard analog voltage/current output or digital signal transmission, making it easy to interface with the main control system.

Real time monitoring continuously collects environmental and equipment parameters to achieve precise control of the process.

The alarm function can be configured with threshold alarms to promptly prompt abnormal states.

3、 Typical application areas

Specific purpose of the application system

The vacuum system monitors the vacuum sensor signal to ensure the sealing of the equipment chamber.

The gas supply system collects signals from mass flow meters (MFCs) and pressure sensors to control the gas flow rate.

The temperature control system receives signals from thermocouples or RTD temperature sensors for heating or cooling regulation.

The safety interlock system monitors signals from safety sensors such as door switches and gas leaks.

4、 Technical features (refer to TEL sensor module design)

Characteristic Description

Multi channel input supports multiple analog/digital sensor inputs.

High precision conditioning circuits, low-noise amplifiers, and filters ensure signal quality.

Industrial grade design with anti-interference and anti vibration capabilities, suitable for clean room environments.

The standard interface is compatible with various signal formats such as TTL, 4-20mA, 0-10V, etc.

Modular installation facilitates maintenance and replacement, and supports hot swappable design (depending on model).

Product imag

Related website links

RADISYS 61-0158-04 CPU Control Card

ASEA DSQC100 connector backplane

ABB UN0821B-P redundant output module

Other website links

MOTOROLA MVME2604761 IO系统模块

ABB GJR5251200R0202 07AI90-S D2 分析输入单元

ABB  UFC933A102 3BHE048062R0102  电路板