TEL Tokyo Electron 1D81-000129 Interface Panel

TEL Tokyo Electron 1D81-000129 Interface Panel

Product Details Introduction

TEL Tokyo Electron 1D81-000129 Interface Panel is a standard electrical/signal interface module used in semiconductor equipment, mainly used to centrally connect and manage signals, power or communication lines between the main control system and various subsystems (such as vacuum, gas, handling, temperature control, etc.). It plays a role in bridging, isolating, distributing, and facilitating maintenance in device systems.

1、 Basic Product Information

Project Content

Product model 1D81-000129

Product Name Interface Panel

Manufacturer Tokyo Electron Ltd. (TEL)

Panel Function Positioning Electrical/Communication Interface Integration and Distributed Connection Platform

Install the front area of the control cabinet, main control system back panel, or I/O rack

2、 Main functions and functions

Functional category description

Centralized signal connection integrates scattered signal cables, communication lines, or power lines into a unified control system.

Physical interface standardization provides standardized interfaces (such as D-sub, MIL, terminal block) for easy cable management and quick replacement.

Signal protection between electrical isolation/protection and control systems is achieved through optocouplers or lightning arresters (optional function).

Easy to maintain clear interface identification and modular layout, facilitating troubleshooting and system upgrades.

3、 Typical application areas

This module is suitable for signal aggregation and management of sub modules within the following TEL systems:

1. Gas delivery system (GAS BOX)

Interface MFC, valve drive board, flow monitor;

Manage the input and output of gas path signals.

2. Vacuum system control

Vacuum pump start stop, vacuum gauge signal input;

Summary of interlocking control signals and alarm signals.

3. Chamber temperature control system

Heater switch, power signal, thermocouple/RTD sensor signal input connection.

4. Wafer handling/robotic arm system

Position sensors for process arms and lifting platforms;

Safety door interlock and action completion feedback.

Product imag

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