TEL Tokyo Electron 1D81-000140 Interface Board

TEL Tokyo Electron 1D81-000140 Interface Board

Product Details Introduction

TEL Tokyo Electron 1D81-000140 Interface Board is a critical signal interface module used inside semiconductor equipment, mainly for signal interaction, isolation, and transfer between control systems and execution/detection units. This interface board is an indispensable part of the TEL device control system, with high reliability, multi-channel support, and excellent anti-interference performance.

1、 Product basic information

Project Content

Product Name: Interface Board

Product model 1D81-000140

Manufacturer Tokyo Electron Ltd. (TEL)

The board series belongs to the 1D81 series (used for signal input/output and function expansion)

Installed in the control cabinet, IO interface box, or functional module backplane for use

2、 Main functional purpose

Function Category Function Description

Signal relay and adaptation convert the controller output signal into a voltage/current signal recognizable by the device, or vice versa.

The input-output interface integration provides multiple DI (digital input), DO (digital output), AI (analog input), or AO (analog output) interfaces.

Signal isolation and protection provide optocoupler or relay isolation to protect the main control system from overvoltage/overcurrent effects.

Equipment interlocking and status acquisition collect system status such as chambers, valves, temperature, current, etc., as the basis for judging system operating conditions.

3、 Typical application system

1. Signal acquisition and interlocking control in TEL wafer processing equipment:

Example: TEL Trias ™  ALD、Unity ™  CVD、Telius ™  Etch、Clean Track ™  series

2. Used for signal bridging in the following functional modules:

System module application instructions

Gas supply unit (GAS UNIT) receives/controls signals from MFC, valves, and pressure sensors

The temperature control system of the cavity monitors temperature signals and controls the switches of the heater and cooler

Vacuum system control receives vacuum gauge signals, controls vacuum pumps and vacuum valves

Automated handling systems exchange signals with sensors, process arms, and other components

Product imag

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