TEL Tokyo Electron EC81-000016-11 Circuit Board

TEL Tokyo Electron EC81-000016-11 Circuit Board

Product Details Introduction

The TEL Tokyo Electron EC81-000016-11 circuit board is a specialized functional board used in TEL semiconductor equipment, widely used in equipment control systems, communication interfaces, or I/O management. This model number belongs to TEL's EC81 series and is typically used for integrating electrical control, communication management, equipment interlocking, and other functions.

1、 Basic Information

Project Content

Product Name: Circuit Board/PCB Assembly

Product model EC81-000016-11

Manufacturer Tokyo Electron Ltd. (TEL)

Category Control/Communication/Signal Management Function Board

2、 Possible functions (speculated based on the EC81 series functional structure)

Although the official detailed public information on EC81-000016-11 is limited, according to the TEL numbering system and the structure of similar EC81 series cards, this circuit board may have the following functions:

Function Category Function Description

The signal processing function amplifies, filters, or converts signals from sensors, actuators, relay boards, etc.

The communication bridge serves as a communication bridge between the main control system and lower level modules, supporting RS-232, RS-485, or TEL proprietary protocols.

I/O interface management provides digital/analog input/output interfaces for controlling devices such as pumps, valves, heaters, etc.

The control logic unit is embedded with simple control logic (such as state switching, timing control) for distributed control.

3、 Typical application areas

EC81-000016-11 circuit board is commonly used in the following TEL systems:

1. Wafer processing system

Used in modules such as cleaning, developing, and gluing to control liquid flow and valve action.

2. Vacuum system

Control subsystems such as vacuum pump, chamber pressure sensor, vacuum valve, etc.

3. Temperature and Heating Control

Manage the temperature sampling and closed-loop regulation logic of heating elements.

4. Interlocking/safety system within the device

Collect signals from door locks, chamber covers, photoelectric sensors, etc. to achieve interlocking control.

Product imag

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