TEL Tokyo Electron 3281-0001110-13 Lighting Control Board

TEL Tokyo Electron 3281-0001110-13 Lighting Control Board

Product Details Introduction

TEL Tokyo Electron 3281-0001110-13 Lighting Control Board is an electronic control component specifically designed for semiconductor manufacturing equipment. Its main functions include precise control, dimming management, and status feedback of the lighting system. It is widely used in applications such as detection lighting, alignment light sources, and internal observation lights in wafer processing equipment.

1、 Basic Product Information

Project Content

Product model 3281-000110-13

Product Name: Lighting Control Board

Manufacturer Tokyo Electron Ltd. (TEL)

Function type: Light source power control/dimming driver module

2、 Main functions

Functional category description

Lighting power control controls the switching, voltage stabilization, and timed operation of lighting fixtures.

Brightness adjustment achieves precise adjustment of lighting brightness (PWM or DAC mode) to meet different detection needs.

Status feedback provides lighting status signals (on/off/fault) back to the main control system.

Overload protection provides automatic protection for situations such as overcurrent and overheating of the light source.

3、 Typical application areas

The lighting control board 3281-000110-13 is mainly used in the following TEL equipment systems:

1. Wafer Alignment and Inspection System

Control the detection lighting before and after development;

To provide a stable illumination source for aligning the camera.

2. Inside the wafer handling chamber

Provide an observation light source inside the vacuum or wafer cavity;

Startup/shutdown is remotely controlled by the operating system.

3. Lighting control of lithography and development equipment

Control the auxiliary lights in the lithography area;

Auxiliary personnel observe during equipment maintenance.

4. Equipment panel and status indicator lights

It is also possible to control the working status indicator lighting (red, green, yellow lights, alarm lights) on the device panel.

Product imag

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