Novellus Systems 061-00684-0011 Interface Vector Board

Novellus Systems 061-00684-0011 Interface Vector Board

Product Details Introduction

Novellus Systems 061-00684-0011 Interface Vector Board is a specialized control interface module used in Novellus semiconductor manufacturing equipment. The main function of this module is to serve as a signal bridge between the system controller and various actuators and sensors, centrally managing and distributing digital, analog or communication signals. It is one of the key central components in equipment process automation control systems.

The main application areas of the Novellus 061-00684-0011 interface vector board are as follows:

Distribution of process control signals

Used to distribute the signals output by the main controller to the heaters MFC、 Execution/detection components such as vacuum valves and position sensors.

Centralized signal management and conversion

Centralize the collection of input signals from multiple sensors and feedback modules in the equipment, and upload them to the main control system, supporting digital, analog, and multiple communication formats.

Support complex CVD/ALD/PVD process equipment

Widely used in deposition equipment such as the Novellus Concept series and ALTUS series as a transfer platform in process execution and feedback chains.

Electrical isolation and protection

The board is equipped with optocouplers, voltage limiting, filtering and other circuits to achieve signal isolation, anti-interference, and prevent high voltage or abnormal signals from affecting the system.

Equipment status interlocking and safety logic support

Before starting the device, the vector board is connected to the interlocking signal to determine whether it is allowed to start, such as whether the door lock is closed, the cavity is evacuated, etc.

Standardization of system module interfaces

As a standard interface platform, this board unifies the access methods of different modules, facilitating system integration and wiring.

Adapt to multiple subsystems

It can connect multiple sub modules such as power module, cooling module, and air circuit module to achieve fast signal interaction between modules.

Used for equipment debugging and maintenance

In engineering mode, it is used to read real-time signal status, execute component responses, and assist in quickly locating equipment issues.

Product imag

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