Novellus Systems 03-169460-00N Interlocking Board

Novellus Systems 03-169460-00N Interlocking Board

Product Details Introduction

Novellus Systems 03-169460-00N interlock board is a safety monitoring and interlock control module used in semiconductor equipment. Its main function is to monitor the real-time operation status, door control protection, gas source pressure, power status and other key conditions of the equipment, and to prevent system startup or forced shutdown when conditions are not met, in order to ensure personnel safety and equipment stability.

The following are the main application areas of this module:

Safety door and cavity lock control

Monitor whether the equipment door is closed properly to prevent high-risk processes from operating while the door is open.

Vacuum and air pressure interlock

Check whether the pressure in the vacuum chamber meets the standard, whether the gas supply is normal, and prevent process abnormalities.

Power supply and temperature control safety monitoring

Check whether the heater and cooling system are in a safe state to avoid overheating or power failure.

Process initiation permit logic

Link multiple safety signals as a condition judgment module before starting the process.

Emergency shutdown in abnormal state

Once the interlocking conditions are triggered (such as door opening, low air pressure, abnormal voltage, etc.), the system operation will be immediately interrupted.

Communicate with the main control system

Feedback the safety status to the main controller to achieve centralized safety management.

Equipment maintenance and protection

Provide safety barriers in maintenance mode to ensure that equipment does not malfunction during engineer operation.

Suitable for various Novellus devices

Including but not limited to multi generation process equipment platforms such as Concept series, ALTUS, INOVA, etc.

Product imag

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