Novellus Systems 03-136531-00 Liquid Interface Module

Novellus Systems 03-136531-00 Liquid Interface Module

Product Details Introduction

Novellus Systems 03-136531-00 Liquid Interface Module is an electronic control module specifically designed for semiconductor manufacturing equipment. It is mainly responsible for the control and signal interface of various liquid valves and pumps in liquid process systems. It can achieve precise adjustment and monitoring of liquid flow, ensuring the stable and reliable operation of the liquid supply system.

The main application areas include:

Control the flow rate and switch status of chemical liquids and pure water.

Connect liquid valves, pumps, and other actuators to achieve automated liquid delivery.

Collect liquid state signals such as flow sensors and pressure sensors.

Support safety interlock and alarm functions for liquid process systems.

Cooperate with the main controller to achieve precise control of the liquid process flow.

Used for wet etching, cleaning, and coating processes in semiconductor manufacturing.

Improve the response speed and control accuracy of the liquid supply system.

Support equipment maintenance and fault diagnosis to ensure process continuity and equipment safety.

This liquid interface module is an indispensable key component in the liquid process system of semiconductor equipment, ensuring the automation, efficiency, and stability of the entire liquid transportation process.

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