KLA Tencor 720-21901-003 Interface Board

KLA Tencor 720-21901-003 Interface Board

Product Details Introduction

Application areas of KLA Tencor 720-21901-003 interface board:

1. Semiconductor wafer inspection system

Application Description: Used in wafer surface defect detection systems to amplify and output analog signals received from scanning optical systems.

Target task: Improve the quality of image acquisition signals to ensure high sensitivity and stability in defect detection and analysis.

Typical supporting equipment: KLA 2xxx, 5xxx, 6xxx series detection platforms.

2. Pattern overlay measuring equipment

Application Description: In the measurement of multi-layer pattern alignment accuracy, the interference or imaging signals output by the optical system are processed through an interface board.

Target task: Support high-resolution image sampling and provide accurate coordinate reference signal transmission.

Function positioning: Located between the imaging system and the Data Acquisition Board, serving as a bridge.

3. Optical scanning system

Application description: Collect reflected or transmitted signals in the optical scanning head inside the device, amplify and filter them through the interface board, and send them to the control module.

Target task: Enhance weak light signals and adapt to the processing capabilities of subsequent circuits.

4. Automation equipment control system

Application Description: As a signal interface circuit, it can achieve synchronous control and feedback acquisition with platform motors, sensors, light sources, and other modules.

Target task: Coordinate the precise coordination between the scanning process and displacement control to improve scanning accuracy.

5. Device Communication and System Integration Module

Application Description: Connect to the upper computer or central control system through an interface board to achieve standardized output of measurement signals.

Target task: Ensure the stability and anti-interference ability of system signal communication, and support remote diagnostic function.

Summary:

Application domain functional roles

Wafer defect detection equipment collects and amplifies optical image signals

Precision Image Synchronization Transmission Interface Module for Pattern Alignment Measurement System

Relay components that link automation control systems with light sources, platforms, and detectors

The factory equipment integration system supports data interface modules for signal communication and equipment linkage

Product imag

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