KLA Tencor 073-404423-00 Input/Output Module

KLA Tencor 073-404423-00 Input/Output Module

Product Details Introduction

KLA Tencor 073-404423-00 Input/Output Module - Product Application Fields

Semiconductor wafer inspection system

Applied to wafer overlay detection systems such as KLA Tencor 5100 and 5107.

Manage the input and output signals of peripherals such as shutters, electric platforms, light sources, and sensors.

Implement coordinated control and signal feedback between various functional modules within the device.

Wafer stacking measurement equipment

Used to detect stacking errors between multi-layer lithography patterns.

Control the coordinated action of the optical head and displacement platform to ensure measurement accuracy and synchronization.

Receive triggering signals such as positioning completion and detection start, and output control commands.

Automated actuator control system

Manage peripheral devices such as air valves, shutters, limiters, temperature or air pressure sensors, etc.

Support real-time control and status feedback during device operation to enhance system stability.

It can serve as a key input/output monitoring node in fault diagnosis.

Factory automation system integration

Connect to the upper computer or Manufacturing Execution System (MES) for status feedback and remote control.

Provide standard signal interfaces for communication between devices, automatic start stop, alarm linkage, and other functions.

Support devices to achieve closed-loop process control in smart factory environments.

Product imag

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