KLA Tencor 710-806051-01 Single Axis Controller

KLA Tencor 710-806051-01 Single Axis Controller

Product Details Introduction

KLA Tencor 710-806051-01 is a single axis motion controller used for precision equipment, commonly found in KLA Tencor's wafer inspection and metrology equipment. Its main function is to control the precise motion of a certain mechanical axis (such as a linear slide or rotating platform), ensuring that the detection system has high repeatability and response speed during scanning or alignment.

[Product Application Fields]

1. Semiconductor wafer surface inspection system

Typical devices: such as Surfscan, SP1, SP2, 2360, etc

Function: Drive optical sensors or probes to move accurately, achieve high-resolution scanning of wafer surfaces, and detect micro defects such as particles, scratches, and foreign objects.

2. Precision Alignment Systems

Application method: Control a separate motion axis inside the device to achieve precise positioning of the lens, laser, or sample stage.

Typical operation: Nano level alignment adjustment to ensure optical path consistency.

3. Wafer handling and robotic arm system

Purpose of use: To perform precise linear or rotational movements in wafer automatic transfer or probe positioning systems, in conjunction with inter station transfer.

Advantages: High speed response, smooth movement, excellent error control.

4. Scanning motion of optical detection platform

Control objective: Single axis motion of the scanning table or platform (such as X-axis, Y-axis, Z-axis, or θ axis).

Supporting equipment: laser scanner, confocal microscopy system, etc.

5. Wafer thickness or flatness measurement system

Control content: By driving Z-axis displacement, the probe or optical head can scan different heights of points.

Key parameters: sub micron accuracy, closed-loop feedback, high stability.

Summary of Characteristics

Project Description

Single axis control (suitable for controlling a single motion platform)

The interface method is usually based on the VME bus architecture

Application equipment such as wafer inspection equipment, defect detection equipment, image acquisition platform, etc

Control characteristics: high-precision position control, fast response, low drift

Can be integrated with linear encoders, servo motors, or stepper motors for complementary use

Product imag

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