AMAT 0190-54072 RF Generator

AMAT 0190-54072 RF Generator 

 Introduction

AMAT 0190-54072 RF Generator

Product Features

1. Accurate power output, stable repeatability of plasma process

2. Equipped with arc protection to reduce damage caused by ignition in the cavity

3 impedance matching, fast start, stable and adaptable to vacuum chambers

4 digital controls for convenient access to remote monitoring of devices

5 compact body suitable for internal installation in semiconductor cabinets

Product Specifications

Industrial AC power supply compatible with semiconductor equipment cabinet

2 fixed RF frequencies to meet plasma process requirements

3 built-in fault self-test abnormal output alarm signal

4. Support real-time data upload through device bus communication

5. Water cooling for long-term operation and stable temperature control

Application Areas

1. Plasma power supply for semiconductor wafer etching

RF power supply unit for thin film deposition equipment

3 Vacuum chamber plasma cleaning matching

4 PVD coating process plasma excitation

5. Replacement and matching of semiconductor equipment spare parts

This AMAT 0190-54072 RF generator is a spare part from the application material factory, commonly used for replacing power supplies in old semiconductor equipment

Product imag

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