AE 3155162-037 RF Matching Module

AE 3155162-037 RF Matching Module

 Introduction

AE 3155162-037 RF Matching Module

Product Features

1. Quick automatic tuning response, quickly reducing RF reflection power

2. Low power transmission loss, uniform and stable plasma ignition

3 built-in arc protection, protecting the RF host when the cavity ignites

4 metal shielding structure to resist electromagnetic interference from cabinets

5 modular design, easy disassembly and replacement, time-saving

Product Specifications

1. Used with AE Navigator series RF generator

13.56MHz RF impedance automatic tuning

3. Water cooling and heat dissipation, stable temperature control during high-power and long-term operation

4 built-in sensors provide real-time feedback on matching status

5 original factory standard interfaces, directly connected to RF lines

Application Areas

1. RF impedance matching unit for semiconductor etching equipment

2 PECVD thin film deposition equipment RF matching module

3 Power allocation components for vacuum plasma cleaning equipment

4 Semiconductor Process Chamber Plasma Process Preparation

5 AE Navigator RF Matcher Spare Parts Repair and Replacement

This AE 3155162-037 RF matching module belongs to the Navigator 10013 series matching box and is a commonly used spare part for semiconductor vacuum machine maintenance

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