Lam 857-174321-111 RF Matcher

Lam 857-174321-111 RF Matcher

 Introduction

Lam 857-174321-111 RF Matcher

Product Features

1. Fast automatic impedance tuning response, reducing RF reflection power

2. Low power transmission loss, stable and uniform plasma ignition

3 built-in arc protection, protecting the RF power supply when the cavity ignites

4 metal shielding shell to resist electromagnetic interference from the cabinet

5 original factory module structure, easy disassembly and replacement, time-saving

Product Specifications

1. Power supply for supporting pan forest RF generator

2 RF impedance automatic tuning, suitable for etching cavity load

3. Water cooling and heat dissipation, stable temperature control during high-power and long-term operation

4 built-in sensors provide real-time feedback on matching status

5 original factory standard interfaces, directly connected to RF lines

Application Areas

1. Fanlin Semiconductor Etching Equipment RF Impedance Matching Unit

RF power allocation for plasma etching process

3 Vacuum chamber plasma cleaning matching module

RF matching components for thin film deposition equipment

5 Lam Forest Etching Machine Spare Parts Maintenance and Replacement

This Lam 857-174321-111 RF matching device is an original matching box for Panlin etching machines, commonly used spare parts for semiconductor machine maintenance and replacement

Product imag

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