AE 3Z80-000653-V2 RF Matcher

AE 3Z80-000653-V2 RF Matcher

 Introduction

AE 3Z80-000653-V2 RF Matcher

Product Features

1. Fast automatic tuning speed, quickly reducing RF reflection power

Low power transmission loss and stable plasma ignition

3 built-in arc protection, protecting RF power supply during ignition

4. Good shielding effect to resist electromagnetic interference from cabinets

5 modular structure, easy disassembly and replacement

Product Specifications

1. Equipped with RF power supply of the same series

2 automatic impedance tuning, suitable for vacuum loads

3 water cooling and heat dissipation, stable operation for a long time with high power

4 built-in sensors provide real-time feedback on matching status

5 original factory interfaces, directly connected to RF lines

Application Areas

RF impedance matching of semiconductor etching equipment

2 PECVD thin film deposition RF matching unit

3. Power allocation of vacuum plasma cleaning equipment

4 Optical Coating Plasma Process Matching

Replacement of spare parts for high-frequency RF equipment in Japan

This AE 3Z80-000653-V2 RF matching device is used for RF power impedance adjustment and is a commonly used spare part for semiconductor vacuum machine maintenance

Product imag

ontroller Module

FALCON SG2K-1T Channel module
Reliance 57652 0-57652-D controller module
RELIANCE 57C404C Communication module

Other website links

DSMB125 可编程控制系统
DSMB124 电源模块
DSPC157 高压变频调节板卡