AMAT 0195-14719 High precision High temperature Sensor

AMAT 0195-14719 High precision High temperature Sensor 

 Introduction

AMAT 0195-14719 high-precision high temperature sensor is a temperature measurement component used in material process chambers for real-time monitoring of wafer base temperature.

Product Features

High temperature measurement accuracy ensures uniform and stable temperature throughout the entire wafer.

Resistant to plasma corrosion, suitable for harsh environments such as etching and deposition chambers.

Fast response speed, quickly capturing small temperature changes.

Low particle precipitation, in compliance with semiconductor cleanroom standards.

Equipped with signal shielding to resist RF environmental interference.

Product Specifications

Model 0195-14719 High Temperature Sensor Component.

Compatible with AMAT Centura series process chambers.

High temperature wide range, thermocouple type temperature acquisition.

Simulate temperature signal output to the main control of the machine.

Equipped with specialized cable connectors for direct assembly and replacement.

Application Areas

Real time monitoring of semiconductor wafer base temperature.

Etching chamber heating plate temperature control acquisition.

Temperature measurement of PVD thin film deposition chamber.

Replacement of AMAT old machine temperature spare parts.

Temperature closed-loop control of plasma process chamber.

This sensor is the sensing core in the temperature control loop of the cavity, and the temperature reading directly affects the quality of the film and etching process.

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