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Edwards A409-14-977 Vacuum Dry Pump

Product Features

1. Oil free dry structure will not contaminate the process chamber

2 stable and corrosion-resistant process gases for semiconductor extraction

3. Low vibration, reliable continuous operation for a long time

4. Equipped with status monitoring and quick fault alarm

5. Long maintenance cycle, simple disassembly and maintenance

Product Specifications

1. Three phase industrial AC power supply

Two pumping speeds are used to obtain the pre stage vacuum of the molecular pump

3. The built-in cooling system operates continuously and maintains stable temperature control

4 communication interfaces can be connected to the main control of the machine

5. Corrosion resistant pump body material adapted to process exhaust gas

Application Areas

1. Pre stage vacuum pumping of semiconductor machine molecular pump

2 PECVD thin film deposition equipment coarse vacuum unit

3 Etching equipment load lock chamber extraction

4 plasma cleaning vacuum matching pump set

5 Edwards IPX500A Dry Pump Spare Parts Replacement

This Edwards A409-14-977 dry pump model corresponds to IPX500A and is a commonly used spare part for repairing semiconductor vacuum front-end pumps

Product imag

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ontroller Module

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