AE 3152535-367 DC power module
Introduction
AE 3152535-367 DC power module
Product Features
Stable DC output ensures stable power supply for plasma process
2 built-in multiple protections, automatic output cut-off for overvoltage and overheating
3-board shielding design to resist cabinet electromagnetic interference
4 original factory interface adaptation, direct replacement without changing the circuit
5 modular structure, fast disassembly and maintenance speed
Product Specifications
1. Equipment AC input power supply
2 channels of DC voltage stabilization output
3 wide temperature tolerance, suitable for temperature rise inside the cabinet
4 can provide feedback on the operating status of the power supply to the main control
5 layers of PCB board, reliable insulation performance
Application Areas
1. Power supply components for semiconductor PVD sputtering equipment
Internal power supply for vacuum plasma process power supply
3 DC power supply supporting board for thin film deposition equipment
4 Etching machine plasma power supply unit
5 AE DC power supply maintenance spare parts replacement
This AE 3152535-367 DC power module is the internal core board of AE plasma power supply and a commonly used spare part for semiconductor equipment maintenance
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