VAT 64250-UE52-AAT1 electric actuator

VAT 64250-UE52-AAT1 electric actuator 

 Introduction

VAT 64250-UE52-AAT1 electric actuator

Product Features

1. Fast action response, sensitive valve opening and closing control

2. High positioning accuracy, stable and reliable flow regulation

3. Good anti vibration performance, suitable for vacuum equipment working conditions

4. Comes with status feedback for easy device reading of location

5. Compact structure, easy installation and debugging

Product Specifications

1. Industrial standard power supply adapted vacuum control cabinet

2 adjustable stroke range to meet vacuum valve control requirements

3 built-in position sensors provide real-time feedback on valve position

4. Support industrial communication access to automation systems

5 shell protection level, high vacuum environment, durable

Application Areas

1. Semiconductor vacuum pipeline valve drive

Vacuum flow regulation of thin film deposition equipment

3. Air path control of vacuum coating chamber

4. Control of Plasma Process Gas Pipeline

5. Vacuum valve drive components for analytical instruments

This VAT 64250-UE52-AAT1 electric actuator is commonly used for vacuum valve matching and is a commonly used replacement spare part for semiconductor equipment

Product imag

ontroller Module

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