Edwards B753-01-000 Turbomolecular Vacuum Pump

Edwards B753-01-000 Turbomolecular Vacuum Pump 

 Introduction

Edwards B753-01-000 Turbomolecular Vacuum Pump

Product Features

1. Oil free pumping design will not cause hydrocarbon pollution to the chamber, ensuring process cleanliness

2. The vibration amplitude is small during long-term operation, and the vacuum pressure remains stable

3. Solid rotor structure with strong continuous operation capability for multiple devices in start stop cycles

4. Equipped with protection monitoring function, automatic shutdown protection for pump body in case of abnormal situations

5. Easy disassembly and maintenance, simple replacement of spare parts, and shortened downtime for maintenance

Product Specifications

1. Industrial standard DC power supply compatible with vacuum unit control cabinet

2. With stable nitrogen pumping speed, it can quickly reach the high vacuum range

3. Support water cooling and heat dissipation solution for long-term high-power operation, stable temperature control

4 built-in communication interfaces can be connected to the device system for real-time reading of operating status

The shell of the whole machine is made of vacuum special alloy material with good corrosion resistance and sealing performance

Application Areas

1. High vacuum acquisition unit for semiconductor wafer etching equipment

Vacuum pump set for thin film deposition PECVD equipment

Vacuum coating process chamber vacuum equipment

4. Analytical instruments, mass spectrometry equipment, ultra-high vacuum matching components

5. Gas Extraction Equipment for Research Vacuum Experiment Cabin

This Edwards B753-01-000 turbo molecular vacuum pump is an imported vacuum spare part commonly used for replacing old pumps in semiconductor equipment

Product imag

ontroller Module

 UNS0119A-P 3BHE029153R0101 Excitation system module
ADEPT 12000-310 Pulse input module
ADEPT 20000-310 Channel module

Other website links

DSCA160A 机器人系统
DSDX451L 数字输出板
DSIH72VP 电流变送器模块