AMAT 0010-70264 Robot Driver

AMAT 0010-70264 Robot Driver 

 Introduction

The AMAT 0010-70264 robot driver is an integrated drive assembly for Endura platform wafer handling robots, which achieves the output of lifting and rotating motion of the wafer manipulator.

Product Features

1. Integrated servo driven harmonic reduction assembly with high positioning repeatability and smooth wafer handling

2. Built in overload and torque protection to prevent collision and damage during wafer handling

3. Anti dust and anti vibration, suitable for clean working conditions inside semiconductor machines

4. Integrated encoder feedback, real-time feedback of position status to device controller

5. Integrated assembly structure, easy disassembly and replacement, reducing production line downtime

Product Specifications

1. Equipment cabinet power supply, compatible with AMAT machine power supply circuit

2. Integrated harmonic reducer, stable and reliable output torque

3. Specialized multi-core aviation connector for integrated power and signal transmission

4. Working environment temperature 5-45 ℃, compatible with clean workshop environment

5. Integrated drive motor and reduction mechanism for the whole machine, integrated unit

Application Areas

1. AMAT Endura series PVD equipment wafer manipulator

2. Centura platform thin film process equipment wafer transfer unit

3. Semiconductor cluster machine platform wafer loading and unloading mechanism

4. Internal wafer handling actuator in vacuum chamber

5. Semiconductor equipment maintenance and replacement spare parts

The AMAT 0010-70264 robot driver is a core motion execution spare part for the wafer transfer system of the application material machine.

Product imag

ontroller Module

WOODWARD 9907-1183 Servo speed governor
FBMSSW output signal module
FLN4234A CPU3680 output signal card

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