Yaskawa SGM7D-1C1FC-TE12 direct drive servo motor

Yaskawa SGM7D-1C1FC-TE12 direct drive servo motor 

 Introduction

Yaskawa SGM7D 1C1FC TE12 is an Yaskawa Sigma 7 series hollow outer rotor direct drive servo motor, commonly used for precision driving of semiconductor equipment rotating stations.

Product Features:

1. Direct drive without deceleration mechanism, eliminating backlash, high positioning repeatability accuracy

2. Built in 24 bit high-resolution encoder for precise and stable angle control

3. Large diameter hollow structure, convenient for cable pipelines to pass through and route wires

4. High inertia design, capable of carrying large inertia loads and strong impact resistance

5. Fully enclosed self cooling structure, low dust, suitable for long-term continuous operation of equipment

Product Parameters:

1. Model: SGM7D -1C1FC - TE12

2. Motor type: External rotor hollow direct drive DD servo motor

3. Encoder: 24 bit absolute value encoder

4. Power supply level: AC200V

5. Installation method: flange direct installation

Application fields:

1. Semiconductor equipment wafer rotation platform driver

2. Inspection equipment turntable and vacuum chamber rotating station execution

3. Wafer handling rotation axis and EFEM rotation mechanism

4. Replacement and maintenance of spare parts for faulty direct drive motors of old equipment

5. Spare parts inventory reserve for semiconductor automation equipment

The SGM7D-1C1FC-TE12 direct drive servo motor has seamless transmission and is the core driving component for achieving high-precision angle control in semiconductor rotary workstations

Product imag

ontroller Module

3BSE018157R1 PM861AK01 Control processor module
5SHX2645L0004 3BHB003154R0101 Thyristor module
5SXE03-0141 3BHB003149P104 Thyristor module

Other website links

ICS TRIPLEX T9451 数字输入模块
KOLLMORGEN S22460-SRS 伺服驱动器
CI860K01 3BSE032444R1通信接口模块