NESLAB 620000000015heat exchange chiller unit

NESLAB 620000000015heat exchange chiller unit 

 Introduction

NESLAB 62000000015 is a heat exchange chiller unit for semiconductor equipment, providing high flow precision circulation cooling.

Application areas

1. Constant temperature cooling of power components in semiconductor etching equipment

2. Heat dissipation of PVD film deposition equipment cavity module

3. Thermal management of the entire semiconductor ion implantation machine

4. RF power supply high-power module cyclic cooling

5. Temperature control of wafer processing platform

6. Vacuum process equipment heat exchanger matching refrigeration

7. Cooling conditions of semiconductor CMP equipment components

8. Heat dissipation and temperature control of large ion source equipment

9. Multi load synchronous cooling of chip testing equipment

10. Temperature control of process circuits in semiconductor production workshops

Product Parameters

1. Three phase 200-208V power supply, 50/60Hz industrial frequency

2. Heat exchange circulation structure, compatible with deionized water cooling medium

3. PID closed-loop temperature control, temperature stability ± 0.1 ℃

4. Integrated flow, liquid level, over temperature, and high pressure multiple protections

5. Supports analog signal communication and can be connected to semiconductor control systems

Overall, the NESLAB 62000000015 chiller unit has a large output flow rate and reliable operation, making it an important heat exchange and cooling unit for semiconductor process equipment

Product imag

ontroller Module

GE 705-1512-01 Automatic card
8421-CC-PS Bus structure module
8521-LC-MT Bus structure module

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