ATS 4092318-001 Three Channel Chiller

ATS 4092318-001 Three Channel Chiller 

 Introduction

ATS 4092318-001 is a dedicated three channel independent temperature controlled chiller for semiconductor equipment, suitable for synchronous heat dissipation of multiple loads in wafer process equipment.

Application areas

1. Temperature controlled cooling of semiconductor etching equipment chamber

2. Multi component heat dissipation of thin film deposition PVD equipment

3. Constant temperature and temperature control for wafer processing platform

4. TEL cluster equipment multi loop synchronous cooling

5. Temperature control system for power semiconductor device testing

6. Thermal management and cooling of chip packaging equipment

7. Temperature control of vacuum process equipment module

8. Cooling of semiconductor ion implantation machine components

9. Precision RF power supply circulating cooling

10. Centralized temperature control for multi load equipment in clean workshops

Product Parameters

1. The three channel circuit has independent temperature control, and each channel can set its own temperature separately

2. High precision PID temperature control, temperature stability can reach ± 0.1 ℃

3. Support fluoride solution/deionized water cooling medium, suitable for clean working conditions

4. Integrated fault diagnosis with flow, liquid level, and over temperature protection

5. Supports industrial communication interfaces and can interface with semiconductor equipment control systems

In summary, the ATS 4092318-001 three channel chiller has multiple independent temperature control circuits and reliable performance, making it the core temperature control and heat dissipation unit of semiconductor process equipment

Product imag

ontroller Module

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