Edwards AC6E1B123300XS Dry Vacuum Pump

Edwards AC6E1B123300XS Dry Vacuum Pump 

 Introduction

#Product Features of Edwards AC6E1B123300XS Dry Vacuum Pump

Edwards AC6E1B123300XS semiconductor dry vacuum pump, suitable for weight corrosion process exhaust conditions, with the following characteristics:

1. Double stage dry Roots structure, completely oil-free pump chamber, preventing reverse oil contamination of the chamber

2. Special anti-corrosion coating for the inner cavity, resistant to corrosive process gases containing dust and halogens

3. Multi zone nitrogen purging to reduce the accumulation and scaling of process by-products

4. Intelligent variable frequency drive, automatically adjusts the speed according to the process load

5. High pumping speed output, quickly complete cavity vacuuming, shorten standby time

6. Water cooled cooling system, high load continuous operation controls pump temperature rise

7. Optimize the gas town circuit to effectively process water vapor and condensable steam

8. Local operation panel for intuitive viewing of operating parameters and device status

9. Industrial communication interface, capable of connecting to factory automation control systems

10. Complete event log storage for easy fault tracing and troubleshooting

11. Integrated isolation valve for intake, shutdown to block gas backflow back into the process chamber

12. Design of shock-absorbing base to reduce vibration transmission and minimize workshop noise

13. Multiple safety interlock protections for overheating, overload, and abnormal intake pressure

14. Integrated body design, suitable for Subfab narrow installation positions

15. Modular partitioning of vulnerable parts, on-site disassembly and assembly, reducing downtime

Edwards AC6E1B123300XS dry vacuum pump is corrosion-resistant and particle resistant, with stable continuous operation, suitable for semiconductor etching and chemical vapor deposition exhaust scenarios.

Product imag

ontroller Module

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Honeywell SC-UCMX01 51307195-175 module
IDPG 940128102 Control card

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PCE835-XYZ-N	6SC6100-0GE01	MC-TAIH53
PCE835-XYZ-A	6SC6101-3B-Z	MC-TAIH62
PCE835-001-T	6SC9711-0BM0	MC-PDOY22 80363975-150
PCE835-001-N	6SC6101-4A-Z	MC-PD1X02
PCE833-001-T	GESPAC PIA-2A	MC-TAIL02
PCE833-001-N	6SC6101-2A-Z	MC-TAIL12