Hirata AR-Wn150CL-3-S-M900-2-EB18A-AW Robot Component

Hirata AR-Wn150CL-3-S-M900-2-EB18A-AW Robot Component   

 Introduction

#Hirata AR-Wn150CL-3-S-M900-2-EB18A-AW Robot Component Product Features

Hirata AR-Wn150CL-3-S-M900-2-EB18A-AW is a semiconductor vacuum wafer handling robot component, with the following core features:

1. Adapt to vacuum chamber environment for automatic wafer handling and transportation

2. Direct drive motor structure, low vibration, smooth operation

3. No battery absolute value encoder, no need to backup battery

4. Built in collision detection function to reduce the risk of arm damage

5. Steel bundle transmission structure to suppress lateral offset drift

6. High repeatability accuracy to meet semiconductor process requirements

7. Optimization of motion algorithm to shorten wafer handling cycle time

8. Reduce magnetic fluid sealing to avoid splashing of the medium inside the cavity

9. Strong arm rigidity and minimal deformation during high-speed movement

10. Support multi axis linkage, collaborative actions of rotation, extension, and lifting

11. Can be connected to the upper controller to achieve automated process control

12. Clean level design, suitable for dust-free wafer handling scenarios

13. Compact structure, suitable for installation space in narrow chambers of equipment

14. Support fault alarm output for easy status monitoring

15. Modular components, easy disassembly, maintenance and repair

Hirata AR‑Wn150CL‑3‑S‑M900‑2‑EB18A‑AW  Robot components, high-precision and low vibration, reliably complete semiconductor vacuum environment wafer handling operations

Product imag

ontroller Module

HONEYWELL FC-PSU-UNI2450U V1.0 vibration module
Honeywell SC-UCMX01 51307198-175 module
Honeywell SC-UCMX01 51307195-175 module

Other website links

 PFTL 101A-2.0 3BSE004172R1枕块式称重传感器
 PFCL 201C-5.0 3BSE027070R5电力保护装置
 PFCL 201C-20.0 3BSE027070R10张力控制器

PCE845-XYZ-F	AMAT 0100-09068	MC-TAMR03
PCE845-XYZ-A	AMAT 0100-03378	MC-TAIH14
PCE843-001-T	AMAT 0100-20335	MC-TAIH13
PCE843-001-N	6134-6SC71-7	MC-TAIH12
PCE843-001-F	6SC6620-0AA01	MC-TAIH04
PCE843-001-A	6SC6100-0GC10	MC-TAIH23
PCE835-XYZ-T	6SC6103-0SE31	MC-TAIH52