NIKON 4S588-13 Six axis Vibration Measurement Device

NIKON 4S588-13 Six axis Vibration Measurement Device

 Introduction

NIKON 4S588-13 six axis vibration measurement device, a specialized detection component for semiconductor lithography machines, collects six degrees of freedom vibration displacement data.

1. NIKON 4S588-13 supports six axis synchronous vibration detection and multi-dimensional acquisition of vibration signals

2. High measurement accuracy, capturing small amplitudes and offsets

3. Fast response speed, real-time output of vibration detection data

4. NIKON 4S588-13 can collect multiple parameters such as displacement, jitter, and tilt

5. Anti site environmental interference, stable internal measurement of the machine

6. Output standardized signals to interface with the main control system of the machine

7. NIKON 4S588-13 comes with a built-in status self-test to identify hardware abnormalities

8. Real time data feedback for equipment vibration compensation and correction

9. Fault data cache, convenient for device fault tracing and maintenance

10. NIKON 4S588-13 is compact in size and suitable for small installation spaces in lithography machines

11. Industrial grade components, capable of long-term uninterrupted testing operations

12. Support temperature environment adaptation and withstand temperature changes inside the cabinet

13. NIKON 4S588-13 metal shell protection, resistant to slight vibration and impact

14. Can participate in the interlocking of the whole machine, output alarm for excessive vibration

15. Data uploading machine, used for process status monitoring

NIKON 4S588-13 six axis vibration measurement device, mainly used for vibration monitoring and compensation of semiconductor exposure equipment.

Product imag

ontroller Module

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