AERA 3030-07404 Mass Flow Controller

AERA 3030-07404 Mass Flow Controller

 Introduction

AERA 3030-07404 Mass Flow Controller

1. Precise control of process gas flow rate, high precision of flow control

2. Fast response speed, able to quickly reach the set flow value

3. Built in temperature compensation to reduce flow deviation caused by ambient temperature

4. Equipped with multiple overload and abnormal pressure protection functions

5. Standard communication interface, easy to interface with device control system

6. Compact body structure, saving equipment installation space

7. Built in real-time traffic monitoring for easy monitoring of process status

8. Excellent sealing performance, suitable for high-purity process gas working conditions

9. Support long-term uninterrupted continuous process operation

10. Anti vibration design ensures stable operation of the equipment in the operating environment

11. Parameter power-off memory, no need to repeatedly debug settings when restarting

12. The gas pathway is clean and meets the requirements of semiconductor clean process

13. Good flow linearity and stable wide range adjustment

14. Easy disassembly and assembly structure, convenient on-site maintenance and replacement

15. Mature sensing solution with minimal drift during long-term operation

The AERA 3030-07404 mass flow controller is commonly used in semiconductor thin film process equipment as a core component for precise flow control of process gases.

Product imag

ontroller Module

5SHY5045L0020 AC10272001R0101 Control module
8115-DO-DC Gas turbine communication module
8121-DI-DC Gas turbine communication module

Other website links

DSBB-110 屏蔽板
RDCO-04C 数字输出模块
DSDI120A 数字输入板

33VM62-000-75	3090-SCCT083	IC3600VLEB1A
33VM62-000-21	3090-SCCT063	IC3600VLEA1
33VM62-000-17	3090-SCCT043	IC3600VDAC1C
33VM62-000-1	3090-SCCT032	IC3600VDAC1
33VM52-020-9	3090-SCCT022	IC3600VCDA1
33VM52-008-4	3090-RTM-317	IC3600VBEA1
33VM52-000-4	3090-MCI101	IC3600VBCU1B