VAT 65046-PAHP-APF2 isolation gate valve

VAT 65046-PAHP-APF2 isolation gate valve 

 Introduction

VAT 65046-PAHP-APF2 isolation gate valve belongs to the 650 series swing valve, which has dual functions of pressure regulation and vacuum isolation. It is the core valve for downstream pressure control of semiconductor machines.

Product Features:

1. Swing plate throttling structure, which can continuously adjust the flow guide and accurately stabilize the vacuum pressure in the chamber

2. Double sealed rotating feedthrough design, low leakage rate, and gas exchange between the inside and outside of the isolation chamber

3. The valve plate has a soft opening and closing action, with extremely low particle release, protecting the wafer process environment

4. Built in power-off protection mechanism to maintain valve position under abnormal working conditions and prevent sudden vacuum changes

5. Integrated position feedback sensor, real-time upload of valve plate opening, convenient for closed-loop control by the upper computer

Product Parameters:

6. Model: 65046-PAHP-APF2

7. Series: VAT 650 Swing Vacuum Control Valve

8. Diameter: DN200

9. Drive: Stepper motor drive

10. Flange: ISO-F standard flange

Application fields:

11. Pressure regulation of semiconductor etching equipment chamber

12. Vacuum pipeline isolation for PVD and CVD thin film deposition

13. Flat panel display coating process vacuum system

14. Pressure stabilization control of plasma process exhaust gas

15. Replacement of VAT 650 series vacuum valve spare parts

Vacuum process pipeline maintenance and replacement, VAT 65046-PAHP-APF2 isolation gate valve can stably control chamber pressure

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