AMAT 0190-51186 Remote Plasma Source

AMAT 0190-51186 Remote Plasma Source 

 Introduction

AMAT 0190-51186 remote plasma source is a matching RPS unit of Endura machine, which generates active free radicals outside the chamber for dry cleaning of the chamber.

Product Features:

1. Plasma is excited outside the cavity to avoid direct contact between the wafer and the arc, reducing the risk of device damage

2. Efficiently decompose clean gases such as NF ∝ to improve the efficiency of removing by-products from the chamber

3. Integrated cavity structure, low particle release, maintaining a clean process environment

4. Built in temperature and power monitoring, automatic shutdown protection for abnormal working conditions

5. Standardized interface assembly, easy disassembly and assembly, reducing machine maintenance downtime

Product Parameters:

6. Model: 0190-51186

7. Type: Remote Plasma Source RPS

8. Compatible machine: AMAT Endura series

9. Working gas: Clean gases such as NF ∝

10. Cooling method: water-cooled structure

Application fields:

11. Endura PVD equipment chamber dry cleaning

12. Removal of polymers inside CVD deposition chamber

13. Regular chamber maintenance of semiconductor thin film machine

14. Plasma active gas supply unit

15. AMAT Endura equipment RPS spare parts replacement

Thin film process chamber maintenance and replacement, AMAT 0190-51186 remote plasma source and original machine gas path, control signal perfectly matched.

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