Aerotech ES13504-9 Multi Axis Motion Controller

Aerotech ES13504-9 Multi Axis Motion Controller 

 Introduction

The Aerotech ES13504-9 multi axis motion controller belongs to the UNIDEX 511 series and is a precision platform multi axis synchronous control unit suitable for semiconductor high-precision positioning stages.

Product Features:

1. Multi axis synchronous interpolation algorithm, smooth multi axis linkage trajectory, reduces positioning deviation

2. Support electronic gear and position synchronization output, which can accurately synchronize with laser and process signals

3. Built in error compensation function, which can correct deviations caused by screw and geometric orthogonality

4. Enrich digital I/O points for easy integration with machine sensors and interlocking signals

5. Industrial grade circuit design, stable long-term operation, suitable for clean cabinet environment

Product Parameters:

6. Model: ES13504-9

7. Series: UNIDEX 511

8. Number of Control Axes: Up to 9 axis servo linkage

9. Input power supply: 220V industrial AC

10. Working temperature: -10 ℃~50 ℃

Application fields:

11. Motion control of semiconductor wafer inspection platform

12. Laser micro machining precision stage drive

13. Multi axis scheduling of optical lithography alignment stage

14. Thin film measurement equipment displacement system

15. Replacement of spare parts for UNIDEX511 series old machine motion controller

Precision stage automation equipment maintenance, Aerotech ES13504-9 multi axis motion controller can achieve multi axis motion collaborative control.

Product imag

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