Sanki Technos CR-712VX Wafer Cleaning Robot

Sanki Technos CR-712VX Wafer Cleaning Robot 

 Introduction

Sanki Technos CR-712VX wafer cleaning robot belongs to the category of wafer processing and transportation robotic arms, specifically designed for wafer picking and placing in wet cleaning machines.

Product Features:

1. Adopting a low dust cleaning arm structure, the release of particles is low in the cleaning solution environment, ensuring the cleanliness of the wafer surface

2. Vacuum adsorption type end effector, which evenly grasps the wafer and prevents deformation of thin silicon wafers

3. Equipped with the ability to quickly replace chips and improve the production capacity of single chip cleaning machines

4. Corrosion resistant surface coating, capable of withstanding acidic and alkaline vapors evaporated in the cleaning environment

5. Equipped with wafer offset detection, the position is automatically corrected before loading to avoid card malfunctions

Product Parameters:

6. Model: CR-712VX

7. Applicable wafers: 200mm wafers

8. Drive structure: Multi joint horizontal rotating robotic arm

9. Working environment: Wet cleaning clean chamber

10. Communication: Machine specific IO interlocking signal

Application fields:

11. Semiconductor Single Chip Wet Cleaning Equipment Wafer Transfer

12. Transfer of upper and lower wafers in the photoresist cleaning machine after photolithography

13. Wafer surface particle cleaning process for picking and placing

14. Automatic wafer feeding unit for oxide layer cleaning equipment

15. Replacement of spare parts for Sanki CR series cleaning robotic arms

Maintenance of the robotic arm in the wet cleaning production line, Sanki Technos CR-712VX wafer cleaning robot is suitable for wet and corrosive conditions in the cleaning chamber.

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