TEL Tokyo Electron RPC-T0051A-11 Input/Output Module
Product Details Introduction
The TEL Tokyo Electron RPC-T0051A-11 input/output module is an I/O signal control board used in semiconductor manufacturing equipment and is one of the key electronic modules of Tokyo Electronics Corporation's equipment. This module is mainly used for collecting and distributing input/output signals between the control system of the device and external executing components, and is an important component to ensure the automated operation of the device.
1、 Product Features
Signal transmission and logic control
Realize the control signal output of the control system for equipment actuators (such as motors, cylinders, valves, etc.);
Receive input signals from sensors or device status feedback components and upload them to the main controller.
Electrical isolation and protection
Equipped with electrical isolation function, it can effectively protect the main control circuit from external signal interference or overload effects;
Provide basic protection functions such as overcurrent and overvoltage to ensure stable operation of the equipment.
Modular interface
Using standard interfaces for easy installation, replacement, or maintenance;
Support multi-channel input and output, adapt to complex control requirements.
2、 Application Fields
Wafer pre-processing equipment
Commonly used in TEL's Clean Track, ACT, Lithium and other series of equipment;
Used for controlling and monitoring processes such as gluing, developing, and cleaning.
automatic control system
Used for signal control and feedback of moving parts in equipment, such as robotic arms and conveyor mechanisms;
Control the operation of auxiliary equipment such as vacuum systems, pressure valves, door locks, etc.
Semiconductor manufacturing factory
Operate as the core control module in 12 inch and 8-inch wafer production lines;
Supports high load operation 24/7, with high requirements for environmental stability.
Equipment maintenance and upgrade
As a vulnerable electronic module, it can be independently replaced in the event of communication or control failures in the system;
Support continuous maintenance and technical extension of the service life of old model devices.
Product imag

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| 2VM62-024-4 | 8010-SLR-100 | IC3600TSKB1B |
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| 2VM62-020-8 | 8010-SFW50 | IC3600TRLM1A1B |