TEL Tokyo Electron 909-031-PLC4A power module
Product Details Introduction
Product Name: 909-031-PLC4A Power Module
Manufacturer: Tokyo Electron Ltd
Product type: Power Supply Module
1、 Product Overview
909-031-PLC4A is a dedicated power module used in Tokyo Electron semiconductor equipment, mainly providing stable DC power supply for control boards, interface modules, sensors, or execution components in the equipment. It is typically deployed in control racks, power distribution cabinets, or modular frameworks and is one of the key foundational hardware components.
2、 Main functions
DC stabilized power supply
Convert AC input or high voltage DC into stable low voltage DC output required by the equipment, such as 5V/12V/24V DC.
Overload and short circuit protection
Built in protection circuit effectively prevents faults caused by voltage overshoot, short circuit, or current overload.
Support multi-point power supply
It can simultaneously supply power to multiple sub modules or subsystems, providing multiple output channels.
Equipment operation indication
Equipped with status indicator lights (such as Power OK, Fault, etc.) for easy monitoring of operational status.
3、 Typical application devices
This power module is suitable for power systems in the following TEL semiconductor manufacturing equipment:
Etcher series etching equipment
CVD/PVD vacuum film equipment
Coater/Developer
Cleaning and heat treatment equipment
Product imag

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