KLA Tencor 710-658076-20 Fault Processor Module

KLA Tencor 710-658076-20 Fault Processor Module

Product Details Introduction

The KLA Tencor 710-658076-20 Fault Processor Module is a diagnostic and system protection module used in semiconductor testing equipment. Its core function is to monitor the system status in real-time and handle various potential faults during device operation, thereby improving device stability and operational efficiency.

Main application areas:

Wafer defect detection system

Applied in wafer inspection equipment such as Surfscan, SP, P series, etc., it provides fault warning and protection for key components such as optical scanning heads, motion platforms, and image processors. The module can monitor the hardware status in real time to prevent sudden failures from causing damage to the system.

Electron beam measurement and imaging equipment

Used in eBeam or HRP series to monitor the operating status of high-voltage systems, electromagnetic scanning modules, or imaging detectors, ensuring stable system operation and abnormal response.

Motion Control and Automation Platform

As a safety monitoring unit in multi axis automation equipment, it detects the operating status of servo systems, power supplies, cable connections, and other parts. When a fault is detected (such as overheating, communication interruption, abnormal voltage), the module can perform system emergency stop, automatic restart, or record error logs for subsequent analysis.

System level diagnosis and remote maintenance

The module supports KLA's remote service interface and can send operation logs and diagnostic results to remote technical support teams for preventive maintenance, firmware upgrades, or remote fault location.

High availability control in production line equipment

Suitable for semiconductor production line equipment that requires uninterrupted operation for 7 × 24 hours, this module enables redundant control, hot backup, and online fault switching to improve the reliability of production equipment.

Typical functional features:

Real time monitoring of equipment operation status (temperature, current, voltage, communication)

Fault detection and recording error codes

Automatic triggering protection mechanism (such as power outage, restart, isolation)

Support remote diagnosis, log collection, and maintenance command execution

Can be integrated into the main control system or subsystem of KLA detection equipment

Product imag

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