KLA Tencor 500-22560-000 Motor Controller

KLA Tencor 500-22560-000 Motor Controller

Product Details Introduction

KLA Tencor 500-22560-000 Motor Controller - Product Application Fields

KLA Tencor 500-22560-000 is a specialized motor controller module used in precision equipment, whose main task is to drive and control the accurate movement of precision motors in the equipment. It has the following typical applications in KLA Tencor's detection and measurement equipment:

1. Wafer Handling Systems

Control the loading and unloading process of wafers in the testing equipment.

Accurately drive the X/Y/Z axis motion platform or robotic arm to ensure smooth transfer of wafers between multiple workstations.

2. Stage Motion Control

Used to drive high-precision optical platforms, scanning platforms, or rotating platforms, achieve nanoscale motion control, and meet requirements such as CD measurement and overlay detection.

3. Optical focusing and lens adjustment mechanism

Control the micro servo motor or stepper motor in the autofocus system to maintain stable imaging performance of the imaging system at different heights.

4. Laser or light source adjustment system

Adjust the angle, position, or focal point of the laser or illumination source to ensure a stable beam path and clear image.

5. Probe or probe position control (such as E-Beam or AFM equipment)

Control the displacement and response speed of the detector at the extremely micro scale for surface contour scanning, defect detection, etc.

Product characteristics (speculation)

Characteristic description

Control type: servo/stepper motor controller (may support closed-loop feedback)

The communication interface communicates with the main control system through CAN, RS-485, or PCIe

Precision control for displacement control at the nanometer or submicron level

Application compatibility seamlessly integrates with KLA detection equipment and measurement platforms

Anti interference design supports EMI suppression and system stability optimization

Product imag

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PCE833-001-T	AMAT 0100-03273	NTRO04
PCE833-001-N	AMAT 0100-35207	57390001-7 D5001 SB5032 ABB
PCE833-001-A	AMAT 0100-15049	PMKHRMBRC3000A
PCE800	AMAT 0100-76252	NKTK01-10
PCD231B PCD231B101 3BHE025541R0101	6SC6108-0SG01	7LD21
PC844-XYZ-T	AMAT 0100-20416	HESG447271R0002 70BK03B-ES
PC844-XYZ-N	AMAT 0100-90659	PHARPS32010000
PC844-XYZ-F	AMAT 0100-91040	HESG447224R0002 70AB01C-ES
PC844-XYZ-A	AMAT 0100-00120	NTRO04
PC844-001-T	AMAT 0100-09034	PHARPS32000000