TEL Tokyo Electron 3M81-004199-11 Digital Input Module

TEL Tokyo Electron 3M81-004199-11 Digital Input Module

Product Details Introduction

The TEL Tokyo Electron 3M81-004199-11 digital input module is a DI (Digital Input) acquisition module used in semiconductor equipment. Its main function is to collect and transmit switch signals (such as sensors, buttons, limit switches, etc.) from field devices to the main control system. This module plays a crucial role in "state detection" in equipment automatic control and is an important foundation for equipment logic control.

1、 Basic Product Information

Model: 3M81-004199-11

Name: Digital Input Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Purpose: Collect external switch status signals and transmit them to the equipment control system

2、 Core functions

Digital signal acquisition

Read binary signals from on-site devices (such as ON/OFF, High/Low).

Communicate with the main control unit

Upload the collected status signals in real-time to the CPU module or PLC system.

Electrical isolation protection

Each input port usually has optocoupler isolation function to improve the system's anti-interference performance and electrical safety.

Used for logical judgment and control decision-making

Implement functions such as safety interlocking, status judgment, and process control through logical programming.

3、 Application Fields

This module is widely used in various semiconductor devices of TEL, and typical usage scenarios include:

1. Monitoring of equipment mechanical structure

Check the status of door cover switch, cabin locking, locator in place, and completion of handling mechanical actions.

2. Gas and liquid system status feedback

Read valve switch status, gas flow path switching signal, pressure switch trigger status, etc.

3. Safety and fault interlocking

Collect input signals such as safety doors, emergency stop switches, and abnormal alarm contacts to form a protection mechanism.

4. Control process driven basis

As a trigger input source for device start/stop, step transition, and automatic operation logic.

Product imag

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