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  • TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board
  • TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board
TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board

TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board

TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board

Product Details Introduction

Product Name:

TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board

(Motor Unit Distribution Board)


Product Features:

This circuit board serves as a distributed connection and signal management module in the motor control system, mainly responsible for:


Reception and distribution of motor control signals


Power and feedback interface connection of the driving unit


Summary of motor status monitoring signals


Data allocation and relay transmission of operating parameters such as current and voltage


Main application areas:

1. Wafer handling system

Suitable for controlling multiple motors in wafer transfer modules, such as robotic arms, slide tables, and lifting shafts.


Manage the operation status of multi axis motors to achieve synchronous or sequential control.


2. Automatic alignment and adjustment platform

Used in conjunction with stepper motors/servo motors to perform precise displacement operations.


Support the allocation of control channels such as XY platform, Z-axis lifting, and rotation axis.


3. Internal multi motor system management of equipment

Manage distributed connections of multiple motors and unify power supply and signal interfaces.


Provide functions such as power isolation, interface protection, and motor interlocking.


4. Drive the actuator inside the vacuum chamber

Control the vacuum valve driver, lifting platform, conveyor slide and other components inside the chamber.


Capable of anti-interference and high reliability signal transmission.

Product imag

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