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Edwards A533-55-945 Dry Vacuum Pump

Introduction

Edwards A533-55-945 dry vacuum pump, belonging to the IL70N series oil-free dry pump, is the main pump for semiconductor process front-end pumping.

Product Features:

1. Oil free dry structure, will not introduce oil pollution into the chamber, ensuring clean process

2. Corrosion resistant pump chamber design, capable of handling corrosive process exhaust gases generated by etching and deposition

3. Built in gas sweep protection reduces the deposition of by-products and extends the service life of the pump body

4. Low operating noise and good adaptability to the production line cabinet environment

5. Comes with a built-in status monitoring interface, making it convenient to remotely monitor pump operating parameters

Product Parameters:

6. Model: A533-55-945

7. Pump type: IL70N multi-stage dry vacuum pump

8. Extraction medium: corrosive process gas

9. Drive: Built in motor integrated structure

10. Communication: Supports device signal feedback

Application fields:

11. Pre stage vacuum extraction of semiconductor etching equipment

12. Vacuum matching for CVD thin film deposition process

13. Plasma process exhaust gas extraction

14. Flat panel display panel manufacturing process vacuum system

15. Replacement of old pump spare parts for Edwards IL70N series

Semiconductor corrosion process vacuum maintenance, Edwards A533-55-945 dry vacuum pump is adapted to the original production line conditions.

Product imag

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