Brooks Automation 002-7090-11 Atmospheric Wafer Robot

Brooks Automation 002-7090-11 Atmospheric Wafer Robot 

 Introduction

Brooks Automation 002-7090-11 atmospheric wafer robot is a robotic arm responsible for wafer transfer in semiconductor EFEM units.

Product Features:

1. Clean grade structural design, low dust production, suitable for clean workshop environment

2. Smooth movement with minimal shaking, high-speed handling can also reduce the risk of wafer fragments

3. Equipped with collision protection, it can stop the machine promptly in case of abnormal touch for protection

4. Original machine module, in situ disassembly and replacement, no need to modify the machine structure

5. The cycle operation has good durability and is suitable for long-term high-frequency wafer picking and placing on the production line

Product Parameters:

1. Match the communication interface of the EFEM device to receive motion commands

2. Equipped with high-precision repetitive positioning to ensure wafer handover alignment

3. Adapt to the standard operating temperature conditions of clean workshops

4. Support vacuum gripper signal feedback to confirm wafer picking status

5. Fault output alarm signal, convenient for operation and maintenance to quickly troubleshoot

Application fields:

1. The internal wafers of EFEM equipment are transferred between the wafer stage and the machine

2. Wafer cleaning equipment atmospheric end loading and unloading operations

3. Detection and measurement equipment for automatic wafer feeding and unloading transport

4. Old machine, atmospheric mechanical arm malfunction, damaged parts replacement

5. Debugging and calibration of wafer handling process after equipment maintenance

Brooks Automation 002-7090-11 is responsible for atmospheric wafer circulation, and its operational stability directly affects the overall production capacity and fragmentation rate of the machine.

Product imag

ontroller Module

LTC391AE01 HIEE401782R0001 HIEE410507P201 module
VMIVME-5565 General electric (ge)
Yokogawa 16114-500 16114-5006 framework

Other website links

WoodWard 5441-693 数据采集装置
BENTLY 3500-44-01-00 输出模块
BENTLY 3500/44M 176449-03 振动监控器