AMAT 0010-28779 Electric Tilt Controller

AMAT 0010-28779 Electric Tilt Controller 

 Introduction

AMAT 0010-28779 electric tilt controller, semiconductor machine process workstation angle adjustment servo drive module.

Product Features:

1. Angle closed-loop control, high fine-tuning accuracy, smooth and impact free tilting action

2. Equipped with limit protection, automatic over travel locking, and protection of mechanical mechanisms

3. Anti cabinet electromagnetic interference, long-term operation angle zero point is not easily offset

4. Modular integrated components, directly replaced in situ, reducing downtime

5. Support storage of multiple angle process parameters for easy and quick switching of operating conditions

Product Parameters:

1. Match the native communication interface of the device to receive angle commands from the entire machine

2. Collect angle feedback signals and transmit them back to the main control of the machine

3. Adapt to the regular working temperature environment inside the cabinet

4. Output driving signal to control tilt actuator

5. Abnormal output fault alarm, easy to repair and locate problems

Application fields:

1. Semiconductor process workstation wafer carrier angle deflection control

2. Tilt posture adjustment and control of film and etching equipment workstations

3. Replacement of spare parts for machine aging tilt controller damage

4. Equipment renovation project motion control component matching

5. Calibration and debugging of workstation angle after cavity maintenance

The inclined posture of AMAT 0010-28779 control station directly affects the uniformity of wafer surface processing.

Product imag

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