Yaskawa XU-RCM2500T-4 Robot Arm Module

Yaskawa XU-RCM2500T-4 Robot Arm Module 

 Introduction

Yaskawa XU-RCM2500T-4 is a semiconductor EFEM front-end module wafer handling robotic arm module used for automatic wafer transfer on machines, often used as a replacement for faulty spare parts.

5 product features:

1. Clean arm structure, low particle generation, suitable for wafer handling conditions in ultra clean workshops.

2. Servo direct drive transmission ensures high-speed and stable operation, high positioning accuracy, and reduces the risk of wafer fragments.

3. Supports dual arm operation, can be paired with vacuum nozzles or edge clamped end effectors.

4. Built in collision sensing detection, immediately stops when encountering foreign objects, protecting the wafer and arm.

5. The interface protocol is native to the machine, easy to disassemble and adapt to the original installation space.

5 product parameters:

1. Suitable for 300mm wafer handling.

2. Repetitive positioning accuracy ± 30 μ m.

3. DC48V servo power supply, compatible with front-end module power supply of equipment.

4. Supports Ethernet and IO signal and host interaction.

5. The working environment temperature is 18-28 ℃, suitable for semiconductor cleanrooms.

5 application areas:

1. Semiconductor EFEM front-end module wafer loading and unloading.

2. Coating and developing track machine wafer transfer unit.

3. Automatic picking and placing of wafers between the wafer box and the process station.

4. Automated wafer handling with quantity detection equipment.

5. Replacement of faulty spare parts for old semiconductor equipment robotic arms.

Overall, Yaskawa XU-RCM2500T-4 belongs to the category of semiconductor specific robotic arm spare parts. There are many refurbished parts available on the market, and accuracy verification must be completed before installation to confirm compatibility with the machine control software version.

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